Sidewall residue and cleaning after plasma dicing: How should the next controlled comparison be designed?

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• How can sidewall composition/morphology be aligned with sensitivity and background data from before/after treatment and known-good samples?
• What traceable data are available for actual masks, passivation, street pretreatment and removal histories?
• How can residue, surface compatibility and function be checked separately for this device without applying a recipe from an abstract?

• How can sidewall composition/morphology be aligned with sensitivity and background data from before/after treatment and known-good samples?
• What traceable data are available for actual masks, passivation, street pretreatment and removal histories?
• How can residue, surface compatibility and function be checked separately for this device without applying a recipe from an abstract?