Impact HV point-of-use high-viscosity photochemical filter

Entegris · Process equipment and thermal control

Purpose: RDL coating/development comparisons need particle, microbubble and filtration histories to assess fluid-delivery contributions.
Technical approach: Impact HV UPE membranes filter compatible high-viscosity photochemicals/polyimide fluids at point of use, retaining particles and microbubbles.
Scope of use: Listed photochemical/PI feeds assessed against part number, chemistry, temperature and pressure windows.
Limitations and open questions: These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitations
The retention rating does not guarantee removal of all nanoscale particles or bubble-free delivery. Use with underfill or EMC containing functional fillers is not documented and needs assessment of formulation changes.
What to prepare
BLNKK suggests documenting chemistry, viscosity, feed/filter-change histories, pressure drop, particles/bubbles, formulation changes and coating defects.
Confirm with the supplier
Confirm parts, compatibility, commissioning/changeout and retention/additive-preservation evidence at the actual flow, temperature and pressure.
Public evidence: The current page and February 2023 datasheet specify the HV configuration, 1 µm retention and 40°C maximum temperature, with temperature-qualified pressure limits.

Supporting references

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