SENresearch 4.0 representative liner-film comparison

SENTECH Instruments · Engineering measurement and characterization

Purpose: Build traceable thickness and optical-property comparisons on representative TSV-liner films.
Technical approach: Polarization spectra are fitted in SpectraRay/4 using material and film-stack models.
Scope of use: Use optically measurable planar reference samples; choose spectral, angle and mapping configurations for the stack and surface.
Limitations and open questions: These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitations
Results depend on model and parameter constraints. Planar-film measurements establish neither deep-sidewall coverage nor leakage or contamination directly.
What to prepare
BLNKK suggests preparing the film/substrate stack, expected thickness, surface condition, process and reference-thickness data. Retain controls, raw spectra and fit models.
Confirm with the supplier
Confirm spectral/angle configuration, options, sample suitability and treatment of roughness or backside reflections. Agree on an independent reference check and measurement repeatability.
Public evidence: Official pages describe dielectric-stack measurements and model/fit/report workflows, not validated deep-TSV sidewall or leakage assessment.

Supporting references

Find the company’s contact details and ask about this solution through its official channels.