B1500A low-current I–V characterization

Keysight Technologies · Warpage, topography and stress metrology

Purpose: Leakage in TSV or insulation test structures requires bias/current comparisons and measurement-validity checks.
Technical approach: Configured B1500A source/measure units apply bias and record IV characteristics; modules, accessories and settings depend on the specimen and current range.
Scope of use: Contactable structures such as TSV-to-bulk coupons, with suitable terminals, guarding and low-leakage fixtures.
Limitations and open questions: These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitations
IV alone cannot distinguish liner pinholes, contamination or cracks, or locate defect depth. Nominal resolution is not measurement accuracy or the complete setup’s usable leakage floor.
What to prepare
BLNKK suggests documenting contacts, bias/current compliance, expected leakage, temperature, guarding and fixture-blank results.
Confirm with the supplier
Confirm SMUs/options, fixtures, wiring, integration/settling times, practical measurement floor, calibration and the required low-current environment.
Public evidence: Keysight’s product page and August 17, 2026 datasheet describe module choices, distinguishing resolution from accuracy under specified conditions.

Supporting references

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