LUMOS II FT-IR residue identification

Bruker · Warpage, topography and stress metrology

Purpose: Unknown residues need chemical comparisons before narrowing cleaning and material-investigation options.
Technical approach: LUMOS II uses infrared absorption for local spectra or chemical imaging. FT-IR configurations offer ATR, transmission and reflection.
Scope of use: Polymers, films and organic contamination with interpretable spectra; mode, detector and sample access must match.
Limitations and open questions: These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitations
Substrate signals, mixtures or aging can prevent unique identification; ATR contact can affect samples. FT-IR, FPA and IR-laser branches have different spectral/mode coverage. Spectra alone do not establish cleanliness acceptance.
What to prepare
BLNKK suggests documenting residue size/location and substrate, with clean controls and known adhesive/cured references. State preservation needs.
Confirm with the supplier
Confirm configuration, spectral coverage, measurement mode, reference libraries and ATR contact conditions, plus any quantitative calibration or complementary analysis.
Public evidence: Bruker describes contamination/polymer applications. A 2020 webinar overview describes examples; its recording was not reviewed.

Supporting references

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