JSR post-CMP cleaning solutions

JSR · Process equipment and thermal control

Purpose: Compare post-CMP cleaning conditions as upstream control of prebond surface residues.
Technical approach: JSR describes particle removal and polymer-type metal inhibitors improving cleaning performance on barrier metals.
Scope of use: Discuss residue cleaning with formulation compatibility confirmed for actual metal/dielectric, slurry and prebond processes.
Limitations and open questions: These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitations
Public information does not establish complete residue removal, corrosion-free processing or hybrid-bond acceptance. Cleaning cannot resolve buried bond voids.
What to prepare
BLNKK suggests preparing materials, slurry/residues, brush/rinse/dry conditions and particle/chemical-residue/roughness comparisons.
Confirm with the supplier
Confirm formulation, materials/equipment compatibility, cleaning window, metal-surface effects and representative-coupon validation.
Public evidence: The readable page provides qualitative cleaning/inhibitor evidence, without specific hybrid-bond validation.

Contact the supplier

Find the company’s contact details and ask about this solution through its official channels.