EAG Auger seed/barrier residue analysis
Eurofins EAG Laboratories · Engineering measurement and characterization
- Purpose
- Compare elements at abnormal RDL line-gap locations when investigating suspected seed/barrier residues.
- Technical approach
- Electron-excited Auger analysis examines exposed features, with elemental maps, linescans or sputter depth profiles.
- Scope of use
- Suitable for located surfaces or prepared cross-sections; assess insulators, charging and vacuum compatibility.
- Limitations and open questions
These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitationsChemical-state information is limited and insulators are difficult. Buried regions need preparation; detected metal alone does not prove a conductive bridge.
What to prepareBLNKK suggests preparing shorted-net coordinates, images, stack/process records, matched controls and preparation history.
Confirm with the supplierConfirm accessible targets, charging/sputtering treatment, quantitative references and correlation with electrical results.
- Public evidence
- EAG documents small-area, bond-pad and cross-section analysis, including semi-quantitative methods and limitations.
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