SmartLab SE XRD analysis of thin-film residual stress and texture

Rigaku · Warpage, topography and stress metrology

Purpose: Metal films can retain deposition/cooldown stress; lattice strain and texture data complement visible shape measurements.
Technical approach: XRD/pole figures identify phase and texture. Tilt-dependent diffraction peaks support sin²ψ stress estimates with appropriate elastic parameters.
Scope of use: For films with measurable diffraction; the documented example is Au on silicon. Confirm other packaging films/regions.
Limitations and open questions: These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitations
The example does not validate every film/region. Signals, texture, sampling and elastic assumptions affect interpretation; lattice stress is not package warpage.
What to prepare
BLNKK suggests supplying film/thickness, substrate, process history, region, texture and comparison samples/shape data.
Confirm with the supplier
Confirm optics/attachments, diffraction planes, method, sampling scale, elastic data, stress assumptions and uncertainty.
Public evidence: XRD 2001, dated July 2026, uses SmartLab SE, HyPix-400 and χφ for texture-aware Au stress estimation.

Supporting references

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