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NEX CG II multilayer metal-film analysis

Rigaku · Packaging processes and engineering validation

Purpose
Contact- or seed-layer process comparisons need film-thickness and elemental-composition data alongside other evidence.
Technical approach
NEX CG II uses indirect-excitation EDXRF, with fundamental-parameters software and stack modelling for film analysis.
Scope of use
Consider it for multilayer films and process coupons with suitable models, references and equipment configuration.
Limitations and open questions

These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.

Scope and limitations

Spot-averaged film data do not directly establish via-wall continuity, local oxidation states or electrical contact quality.

What to prepare

BLNKK suggests preparing the layer sequence, materials and estimated thicknesses, coupon dimensions and reference samples, with comparison locations.

Confirm with the supplier

Confirm the model, spot size, calibration/reference method and sample-specific measurement uncertainty.

Public evidence
Official pages describe multilayer films and distinguish standardless semi-quantitative analysis from quantitative analysis using standards.

Supporting references

Contact the supplier

Find the company’s contact details and ask about this solution through its official channels.

Related engineering problems

These links use established solution relationships. Continue to engineering conditions and evaluation preparation.

BLNKK organizes information from public sources. A company profile does not imply a documented solution. Applicability still needs confirmation against your samples and engineering conditions.