LEXT OLS5500 3D surface topography

Evident · Engineering measurement and characterization

Purpose: Compare accessible surface heights and local topography after TSV reveal.
Technical approach: LEXT OLS5500 combines laser scanning microscopy, white-light interferometry and focus variation.
Scope of use: Select optics and methods for the surface response and geometry; verify accessible regions on representative TSV samples.
Limitations and open questions: These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitations
It does not measure buried voids or continuity, and general semiconductor use does not establish every TSV pitch. The stated guarantee requires specified calibration by authorized personnel.
What to prepare
BLNKK suggests preparing TSV geometry, exposed materials, optical response, target locations and representative samples with reference measurements.
Confirm with the supplier
Confirm method/lenses, visible sidewalls/bottoms, field of view/stitching, calibration, repeatability on actual surfaces and data export.
Public evidence: The named page lists three methods and semiconductor applications, with specified calibration conditions for its accuracy/repeatability guarantee.

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