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Current problemSiC ingot slicing thickness variation and damage
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SiC ingot slicing thickness variation and damage

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3 priority paths1 candidate solution1 source

BLNKK's current understanding

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Object and structure
Upstream SiC ingots and as-sliced wafers
Stage of occurrence
Multi-wire ingot slicing and inspection before grinding/polishing
Observable symptoms
As-sliced thickness variation, TTV, slicing cracks and subsurface damage
Engineering decision
Use thickness maps and damage evidence to compare wire-slicing windows and downstream removal allowance

Paths to assess first

Paths serve different purposes and can be combined
01
As-sliced geometry and damage evidencePair thickness/TTV maps with crack and damage-layer measurements to separate geometry variation from machining damage.
First
02
Wire-slicing and fluid-delivery controlsHold sampling references constant and compare wire, tension, feed, rocking and fluid-delivery windows one factor at a time.
First
03
Downstream grinding/polishing allowancePair damage depth with target thickness to check whether downstream grinding/polishing has enough removal allowance.
First

Current candidate solutions

Sample suitability still needs confirmation
View all 1 candidate solution
Next: confirm engineering conditionsUse 4 key conditions to adjust the assessment order, then choose solutions to compare.
Check engineering conditions →