S neox 6 multi-technology 3D optical surface metrology
Sensofar · Warpage, topography and stress metrology
- Purpose
- Microbump height and coplanarity, RDL topography and local roughness need comparable height and dimensional data to support process decisions, beyond visual inspection alone.
- Technical approach
- S neox 6 combines confocal, interferometry, active-illumination focus variation and spectroscopic reflectometry. The surface and objective guide selection of profiling modes, while transparent-film analysis uses an applicable optical model.
- Scope of use
- The manufacturer describes microbump height, diameter and coplanarity measurements, plus RDL surface and dimensional analysis. Optical accessibility, mode and configuration determine suitability for a particular structure.
- Limitations and open questions
These evaluation considerations are compiled by BLNKK from public information. They are not supplier guarantees or a mandatory submission checklist.
Scope and limitationsSurface profiling does not replace inspection of buried package voids or delamination. Signal availability and uncertainty depend on the objective, reflection/scattering, slope and setup; film analysis also depends on the material and optical model.
What to prepareBLNKK suggests preparing bump dimensions/pitch, surface materials, height references and regions of interest, together with repeatability, tilt-removal and acceptance criteria for representative sample trials.
Confirm with the supplierConfirm suitable modes, objectives and scan coverage, uncertainty on the actual features, and included bump-analysis plugins, data exports and calibration records.
- Public evidence
- Current product/specification pages document four technologies and their measurement conditions. Sensofar describes calibration and verification using traceable standards and the applicable ISO 25178 framework; this is not an arbitrary-sample accuracy guarantee.
Supporting references
Contact the supplier
Find the company’s contact details and ask about this solution through its official channels.
Related engineering problems
These links use established solution relationships. Continue to engineering conditions and evaluation preparation.
BLNKK organizes information from public sources. A company profile does not imply a documented solution. Applicability still needs confirmation against your samples and engineering conditions.