Thin-film curvature and stress measurement methods
The manufacturer describes tracking film stress or stress-thickness product from substrate curvature during deposition and thermal processing.
Required inputs, limitations and sources
Required inputs
Film thickness, pattern coverage and layer sequence;Bare-substrate and process-step curvature maps, including support and temperature;Substrate elastic properties, thermal history and single-layer controls
Main limitations
Confirm optical access, film thickness and the assumptions of the formula first.;Requires optical access and substrate and film-thickness data. It does not show that one thin-film formula can uniquely recover each layer's stress in patterned multilayer RDL.
k-Space Associates · View source ↗
Official technical summary reviewed · Requires optical access and substrate and film-thickness data. It does not show that one thin-film formula can uniquely recover each layer's stress in patterned multilayer RDL.
