Find solutions / Suppliers & solutions / KLA Public capability summary Advanced packaging inspection · substrate and panel metrology Measurement, inspection and failure localization Process equipment and window control Reliability validation and failure analysis
Applications: WLCSP, FOWLP, TSV and 2.5D/3D · TSV / 3D IC · Finished BGA / CSP / WLP components · TSV / UBM / RDL metal films · TSV liners and package dielectrics
Catalog solutions · 5 Warpage, topography and stress metrology Thinning, bonding and RDL/TSV process excursions can affect the wafer front, back and edge, requiring tracking of surface defects alongside bump and interconnect dimensional variation.
Process equipment and thermal control Distinguish thinning and silicon-etch contributions to nonuniform backside TSV reveal height.
Engineering metrology and failure analysis Finished BGA/CSP ball height and coplanarity inspection provides geometric screening data before assembly.
Process equipment and thermal control TSV copper fill needs prior barrier/seed sidewall and bottom-coverage comparisons.
Process equipment and thermal control TSV-liner assessment needs film-quality, stress and thermal-budget comparisons.
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