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SUSS MicroTec

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Public capability summary

  • Wafer-level metrology · alignment · temporary bond and debond process insight
Measurement, inspection and failure localizationProcess equipment and window controlPackage structures and deformation compensation

Applications: Thin wafers, backside processing and 2.5D/3D · 200 mm-class RDL resist patterning · Wafer packaging resist patterns · Tape-mounted thin wafers / temporary carriers · Permanent W2W bonding within 200 mm

Catalog solutions · 5

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Contact information

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Specify the product and process for lithography or temporary bonding/debonding inquiries. The US mailbox is the official North American customer-service routing contact, rather than a dedicated sales mailbox. Official source ↗

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